Application Scenario
In semiconductor fabs, maintaining ultra-clean air is critical to ensuring wafer yield and equipment reliability. This case highlights how our ARMxy controller powers the FFU (Fan Filter Unit) control system in a Class 10 cleanroom.
System Configuration
Y-AI Analog Input Module (for monitoring particle count and airflow)
X-DO Digital Output Module (for controlling FFU fans)
Implementation Details
The Y-AI module collects key environmental data:
• 0.1μm particle count via RS485-to-analog converters
• Air velocity via thermal anemometers (0–10V analog output)
Based on real-time sensor input, the system dynamically adjusts the fan speed of the FFU array to maintain consistent laminar flow.
Control logic is executed through OpenPLC, allowing transparent and flexible automation.
Operators can remotely switch between different cleanroom levels (e.g., Class 10 to Class 100) via secure interfaces.
Key Advantages
✔️ Precision control with ±0.1% high-accuracy AI input
✔️ Supports remote environment grading adjustments
✔️ Fully compatible with cleanroom standards and semiconductor manufacturing environments
